Modeling and Control of a Flexible Sensor Structure in Microassembly
نویسندگان
چکیده
This paper aims at developing a force-guided microassembly technology with in-situ flexible polyvinylidene fluoride (PVDF) beam force sensing and hybrid force/position control based on an infinite dimensional model of the flexible sensor structure. Besides the designed 1-D PVDF cantilever based microforce sensor, as the soft sensor structure itself is installed at the free end of micromanipulator, during manipulation, the sensor beam is necessary to be considered as a distributed parameter flexible link of the manipulator either. Then a hybrid micro-force/position control scheme on the basis of this infinite dimensional sensor/link model is developed. Experimental results verified the effectiveness of the hybrid control scheme as well as the performance of the developed micro-force sensor. Ultimately the technology will provide a critical and major step towards the development of automated manufacturing processes for batch assembly of micro devices. Copyright c ©2005 IFAC
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